HONEYCLE     | Catalyst Carrier | Odor Removal | Ozone Removal | Humidification | Dehumidification | VOC Abatement |Molecular Control

Airborne Molecular Contamination Control

Chemical Guard (AMC Removal Filter)
		A filter to remove low concentrations of airborne molecular contaminants generated in the clean room of semiconductor or LCD manufacturing process or semiconductor manufacturing equipment.  Three types are available for basic gases, acid gases and TOCs.
Honeycomb Washer
		This filter removes water soluble gases (Nox, Sox, NH3) from outside air or in the clean room by dropping DI water.  Moisture control by DI water is also available.