Honeycomb Washer
Clean as ever environments are required for the most advanced semiconductor industries. The honeycomb washer made by NICHIAS is a system which removes water soluble gases (Nox, Sox, and NH3) existing in outside air or a clean room. The honeycomb washer is an ideal system which removes chemicals with excellent performance, lower pressure loss, compact space and lower power consumption, in comparison with a conventional water spray system.
Construction
| Pure water is dripped from the nozzle to the oblique honeycomb (which is made of high adsorptive fiber ceramic) and creates a film of water on the honeycomb surface. The honeycomb washer is a system to remove water soluble chemicals in the air by passing through the film of water. | |
Advantages
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High chemical removal performance By employing our unique fiber ceramic, the honeycomb washer holds water to the inner part of wall and maintains a high chemical removal performance. Low pressure drop The honeycomb construction of highly water adsorptive performance eliminates water dropping, does not require an eliminator and minimizes pressure drop of the whole system. Low energy consumption In comparison with conventional air washer, the honeycomb washer reduces circulated water by 80% and reduces circulation pump power. (energy consumption effect : consumed power is 50% down) Compact space The width of system can be reduced to more than 50% of a conventional air washer. |
Specification
*1 removal ratio : Not guaranteed value, but measured value at system trial test.
*2 airflow: 30,000M3/H assumed
*3 The water supply for evaporation is not included.
Basic Process Flow
Removal Efficiency
Removal Efficiency (after 50 hrs operation): Actual value by test equipment.
Process Inlet condition: Outside Temperature in winter.
Please give us the outside air condition for the design of removal efficiency.
Type
Honeycomb washer is service available for the design under the non-standard condition.
The power consumption and water usage volume are not a guaranty value but for typical design value.Inquiries About Honeycle Products